IEC TS 62607-9-1:2021 纳米制造.关键控制特性.第9-1部分:可追踪的空间分辨纳米级杂散磁场测量.磁力显微镜

标准编号：IEC TS 62607-9-1:2021

中文名称：纳米制造.关键控制特性.第9-1部分:可追踪的空间分辨纳米级杂散磁场测量.磁力显微镜

英文名称：Nanomanufacturing - Key control characteristics - Part 9-1: Traceable spatially resolved nano-scale stray magnetic field measurements - Magnetic force microscopy

发布日期：2021-10-14

标准范围

IEC TS 62607-9-1:2021（E）建立了一种标准化方法，用磁力显微镜（MFM）对扁平磁性试样的空间分辨率低至10 nm的空间变化磁场进行表征。MFM主要检测垂直于样品表面的杂散场分量。分辨率是通过使用磁性纳米结构参考材料校准MFM针尖来实现的。

IEC TS 62607-9-1:2021(E) establishes a standardized method to characterize spatially varying magnetic fields with a spatial resolution down to 10 nm for flat magnetic specimens by magnetic force microscopy (MFM). MFM primarily detects the stray field component perpendicular to the sample surface. The resolution is achieved by the calibration of the MFM tip using magnetically nanostructured reference materials.

标准预览图