GB/T 6616-1995 半导体硅片电阻率及硅薄膜薄层电阻测定非接触涡流法

标准编号：GB/T 6616-1995

标准名称：半导体硅片电阻率及硅薄膜薄层电阻测定非接触涡流法

英文名称：Test method for measuring resistivity of semiconductor silicon or sheet resistance of semiconductorfilms with a noncontact eddy-current gage