ISO 21360-5:2023 真空技术 测量真空泵性能的标准方法 第5部分：非蒸发吸气剂（NEG）真空泵

标准编号：ISO 21360-5:2023

中文名称：真空技术 测量真空泵性能的标准方法 第5部分：非蒸发吸气剂（NEG）真空泵

英文名称：Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 5: Non-evaporable getter (NEG) vacuum pumps

发布日期：2023-11

标准范围

本文件规定了测量非蒸发吸气剂（NEGs）泵浦特性的方法。它适用于所有尺寸和所有类型的负片，包括:—？具有丸状、盘状、环状、条状、模块状、筒状；—？具有泵结构；—？以及在管道和真空室的内表面上的NEG涂层。NEG和其他真空泵的泵送特性的显著区别在于NEG的泵送速度取决于吸附量。此外，特别是在NEG涂层的情况下，粘附概率而不是泵送速度通常是泵送性能的指标。因此，本文件规定了测量泵送速度、吸附量和NEGs粘附概率的方法。警告？假设用户熟悉可燃气体和有毒气体的处理以及超高真空技术。

This document specifies methods for the measurement of pumping characteristics of non-evaporable getters (NEGs). It is applicable to all sizes and all types of NEGs, including those:

—    with the shape of pill, disk, ring, strip, module, cartridge;

—    with pump structures;

—    and NEG coatings on inner surface of pipes and vacuum chamber.

A significant difference of pumping characteristics of the NEG and other vacuum pumps is that the pumping speed of the NEG depends on the sorption quantity. Furthermore, especially in the case of NEG coating, the sticking probability rather than the pumping speed is often the index of the pumping performance. Therefore, this document specifies the methods for measuring the pumping speed, the sorption quantity, and the sticking probability of NEGs.

WARNING    It is assumed that the user is familiar with the handling of combustible gases and poisonous ones and with ultra-high vacuum technology.

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