DIN 50443-1:1988-07 Testing of materials for use in semiconductor technology; detection of crystal defects and inhomogeneities in silicon single crystals by X-ray topography

标准编号：DIN 50443-1:1988-07

英文标题：Testing of materials for use in semiconductor technology; detection of crystal defects and inhomogeneities in silicon single crystals by X-ray topography

德文标题：Prüfung von Materialien für die Halbleitertechnologie; Nachweis von Kristalldefekten und Inhomogenitäten in Halbleiter-Einkristallen mittels Röntgentopographie; Silicium

发布日期：1988-07

DIN 50443-1:1988-07 Testing of materials for use in semiconductor technology; detection of crystal defects and inhomogeneities in silicon single crystals by X-ray topography

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