DIN 50450-5:1994-01 Testing of materials for semiconductor technology; determination of impurities in carrier gases and dopant gases; determination of water traces in gaseous hydrogen chloride by a diphosphorus pentoxide cell

标准编号：DIN 50450-5:1994-01

英文标题：Testing of materials for semiconductor technology; determination of impurities in carrier gases and dopant gases; determination of water traces in gaseous hydrogen chloride by a diphosphorus pentoxide cell

德文标题：Prüfung von Materialien für die Halbleitertechnologie; Bestimmung von Verunreinigungen in Träger- und Dotiergasen; Bestimmung von Wasserspuren in Chlorwasserstoff in der Gasphase mit einer Diphosphorpentoxidzelle

发布日期：1994-01

DIN 50450-5:1994-01 Testing of materials for semiconductor technology; determination of impurities in carrier gases and dopant gases; determination of water traces in gaseous hydrogen chloride by a diphosphorus pentoxide cell

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