DIN 50450-3:1991-03 Testing of materials for semiconductor technology; determination of impurities in carrier gases and doping gases; determination of methane impurity in H₂, O₂, N₂, Ar and He by using a flame ionization detector (FID)

标准编号：DIN 50450-3:1991-03

英文标题：Testing of materials for semiconductor technology; determination of impurities in carrier gases and doping gases; determination of methane impurity in H₂, O₂, N₂, Ar and He by using a flame ionization detector (FID)

德文标题：Prüfung von Materialien für die Halbleitertechnologie; Bestimmung von Verunreinigungen in Träger- und Dotiergasen; Bestimmung von Methanverunreinigungen in Wasserstoff, Sauerstoff, Stickstoff, Argon und Helium mit einem Flammenionisationsdetektor (FID)

发布日期：1991-03

DIN 50450-3:1991-03 Testing of materials for semiconductor technology; determination of impurities in carrier gases and doping gases; determination of methane impurity in H₂, O₂, N₂, Ar and He by using a flame ionization detector (FID)

标准预览图