DIN 50441-3:1985-09 Testing of materials for semiconductor technology; measurement of the geometric dimensions of semiconductor slices; determination of flatness deviation of polished slices by means of the multiple beam interference

标准编号：DIN 50441-3:1985-09

英文标题：Testing of materials for semiconductor technology; measurement of the geometric dimensions of semiconductor slices; determination of flatness deviation of polished slices by means of the multiple beam interference

德文标题：Prüfung von Materialien für die Halbleitertechnologie; Messung der geometrischen Dimensionen von Halbleiterscheiben; Bestimmung der Ebenheitsabweichung von polierten Scheibenoberflächen mit Hilfe des Vielstrahl-Interferenz-Verfahrens

发布日期：1985-09

DIN 50441-3:1985-09 Testing of materials for semiconductor technology; measurement of the geometric dimensions of semiconductor slices; determination of flatness deviation of polished slices by means of the multiple beam interference

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