DIN 50435:1988-05 Testing of semiconductor materials; determination of the radial resistivity variation of silicon or germanium slices by means of the four-probe/direct current method

标准编号：DIN 50435:1988-05

英文标题：Testing of semiconductor materials; determination of the radial resistivity variation of silicon or germanium slices by means of the four-probe/direct current method

德文标题：Prüfung von Materialien für die Halbleitertechnologie; Bestimmung der radialen Variation des spezifischen elektrischen Widerstandes an Silicium- oder Germanium-Scheiben mit dem Vier-Sonden-Gleichstromverfahren

发布日期：1988-05

DIN 50435:1988-05 Testing of semiconductor materials; determination of the radial resistivity variation of silicon or germanium slices by means of the four-probe/direct current method

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