DIN 50437:1979-06 Testing of semi-conductive inorganic materials; measuring the thickness of silicon epitaxial layer thickness by infrared interference method

标准编号：DIN 50437:1979-06

英文标题：Testing of semi-conductive inorganic materials; measuring the thickness of silicon epitaxial layer thickness by infrared interference method

德文标题：Prüfung halbleitender anorganischer Stoffe; Messung der Dicke von Silicium-Epitaxieschichten mit der Infrarot-Interferenzmethode

发布日期：1979-06

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