DIN 50448:1998-01 Testing of materials for semiconductor technology - Contactless determination of the electrical resistivity of semi-insulating semi-conductor slices using a capacitive probe

标准编号：DIN 50448:1998-01

英文标题：Testing of materials for semiconductor technology - Contactless determination of the electrical resistivity of semi-insulating semi-conductor slices using a capacitive probe

德文标题：Prüfung von Materialien für die Halbleitertechnologie - Kontaktlose Messung des spezifischen elektrischen Widerstandes von halbisolierenden Halbleiterscheiben mit kapazitiver Sonde

发布日期：1998-01

DIN 50448:1998-01 Testing of materials for semiconductor technology - Contactless determination of the electrical resistivity of semi-insulating semi-conductor slices using a capacitive probe

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