DIN 32567-4:2015-06 Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 4: Specimen for optical procedures

标准编号：DIN 32567-4:2015-06

英文标题：Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 4: Specimen for optical procedures

德文标题：Fertigungsmittel für Mikrosysteme - Ermittlung von Materialeinflüssen auf die optische und taktile dimensionelle Messtechnik - Teil 4: Prüfkörper für optische Verfahren

发布日期：2015-06

DIN 32567-4:2015-06 Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 4: Specimen for optical procedures

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