DIN 32567-5:2015-06 Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 5: Derivation of correction values for optical measuring devices

标准编号：DIN 32567-5:2015-06

英文标题：Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 5: Derivation of correction values for optical measuring devices

德文标题：Fertigungsmittel für Mikrosysteme - Ermittlung von Materialeinflüssen auf die optische und taktile dimensionelle Messtechnik - Teil 5: Ableitung von Korrekturwerten für optische Messgeräte

发布日期：2015-06

DIN 32567-5:2015-06 Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 5: Derivation of correction values for optical measuring devices

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