DIN ISO 18516:2020-11 Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometers to micrometers (ISO 18516:2019); Text in English

标准编号：DIN ISO 18516:2020-11

英文标题：Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometers to micrometers (ISO 18516:2019); Text in English

德文标题：Chemische Oberflächenanalyse - Augerelektronen-Spektroskopie und Röntgenphotoelektronen-Spektroskopie - Bestimmung der lateralen Auflösung (ISO 18516:2019); Text Englisch

发布日期：2020-11

DIN ISO 18516:2020-11 Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometers to micrometers (ISO 18516:2019); Text in English

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