DIN 50434:1986-02 Testing of materials for semiconductor technology; detection of crystal defects in monocrystalline silicon using etching techniques on {111} and {100} surfaces

标准编号：DIN 50434:1986-02

英文标题：Testing of materials for semiconductor technology; detection of crystal defects in monocrystalline silicon using etching techniques on {111} and {100} surfaces

德文标题：Prüfung von Materialien für die Halbleitertechnologie; Nachweis von Kristalldefekten in Silicium-Einkristallen mittels Ätztechnik an {111}- und {100}-Flächen

发布日期：1986-02

DIN 50434:1986-02 Testing of materials for semiconductor technology; detection of crystal defects in monocrystalline silicon using etching techniques on {111} and {100} surfaces

标准预览图