DIN 32567-2:2014-10 Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 2: Specimen for tactile procedures

标准编号：DIN 32567-2:2014-10

英文标题：Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 2: Specimen for tactile procedures

德文标题：Fertigungsmittel für Mikrosysteme - Ermittlung von Materialeinflüssen auf die optische und taktile dimensionelle Messtechnik - Teil 2: Prüfkörper für taktile Verfahren

发布日期：2014-10

DIN 32567-2:2014-10 Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 2: Specimen for tactile procedures

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