IEC 62047-44:2024 半导体器件.微机电器件.第44部分:MEMS谐振电场敏感器件动态性能的试验方法

标准编号：IEC 62047-44:2024

中文名称：半导体器件.微机电器件.第44部分:MEMS谐振电场敏感器件动态性能的试验方法

英文名称：Semiconductor devices - Micro-electromechanical devices - Part 44: Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices

发布日期：2024-02-22

标准范围

IEC 62047-44:2024描述了用于评估和确定MEMS（微机电系统）谐振电气系统动态性能的术语、定义和测试方法领域敏感设备。它还规定了MEMS谐振电气系统动态性能的样品要求和测试设备领域敏感设备。本文件中的声明也适用于MEMS谐振电领域具有各种驱动机制的敏感器件，如静电、电热、电磁、压电等。

IEC 62047-44:2024 describes terminology, definitions and test methods that are used to evaluate and determine the dynamic performance of MEMS (Micro-Electromechanical Systems) resonant electric？field？sensitive devices. It also specifies sample requirements and test equipment for dynamic performances of MEMS resonant electric？field？sensitive devices. The statements made in this document are also applicable to MEMS resonant electric？field？sensitive devices with various driving mechanisms such as electrostatic, electrothermal, electromagnetic, piezoelectric, etc.

标准预览图