IEC 62276:2025 用于表面声波（锯）的单晶硅片器件应用 - 规格和测量方法

标准编号：IEC 62276:2025

中文名称：用于表面声波（锯）的单晶硅片器件应用 - 规格和测量方法

英文名称：Single crystal wafers for surface acoustic wave (SAW) device applications - Specifications and measuring methods

发布日期：2025-03-07

标准范围

IEC 62276:2025适用于合成石英、铌酸锂(LN)、钽酸锂(LT)、四硼酸锂(LBO)和硅酸镧镓(LGS)单晶晶片的制造，这些晶片旨在用作制造表面声波(SAW)滤波器和谐振器的衬底。与上一版相比，此版本包括以下重大技术变更:a)增加了LN和LT的术语和定义、技术要求、采样频率、测试方法以及透射率、亮度、色差的测量，以适应行业发展的需要；b)增加了术语“包括”（在4.13和6.10中提及）及其定义，因为在第3条中没有对其定义；c)增加了LTV和PLTV的规范，以及LN和LT采样频率的相应描述，因为它们是晶片的关键性能参数；d)增加了LN和LT居里温度规格的公差，以适应行业的发展要求；e)完成了厚度、TV5、TTV、LTV和PLTV的测量，包括厚度、TV5、TTV、LTV和PLTV的测量原理和方法。

IEC 62276:2025 applies to the manufacture of synthetic quartz, lithium niobate (LN), lithium tantalate (LT), lithium tetraborate (LBO), and lanthanum gallium silicate (LGS) single crystal wafers intended for use as substrates in the manufacture of surface acoustic wave (SAW) filters and resonators.
This edition includes the following significant technical changes with respect to the previous edition:
a) The terms and definitions, the technical requirements, sampling frequency, test methods and measurement of transmittance, lightness, colour difference for LN and LT have been added in order to meet the needs of industry development;
b) The term “inclusion” (mentioned in 4.13 and 6.10) and its definition have been added because there was no definition for it in Clause 3;
c) The specification of LTV and PLTV, and the corresponding description of sampling frequency for LN and LT have been added, because they are the key performance parameters for the wafers;
d) The tolerance of Curie temperature specification for LN and LT have been added in order to meet the development requirements of the industry;
e) Measurement of thickness, TV5, TTV, LTV and PLTV have been completed, including measurement principle and method of thickness, TV5, TTV, LTV and PLTV.

标准预览图