ISO 24639:2022 微束分析 分析电子显微镜 用电子能量损失光谱法进行元素分析的能量标度校准程序

标准编号：ISO 24639:2022

中文名称：微束分析 分析电子显微镜 用电子能量损失光谱法进行元素分析的能量标度校准程序

英文名称：Microbeam analysis — Analytical electron microscopy — Calibration procedure of energy scale for elemental analysis by electron energy loss spectroscopy

发布日期：2022-07

标准范围

本文件规定了（扫描）透射电子显微镜中电子能量损失谱的能量阶跃和能量标度的校准程序，不确定度为±3？%对于能量范围0eV到3000？电动汽车。本文件旨在通过充分电子透明的样品（如薄箔样品）传输电子进行电子能量损失谱分析，而不是针对大块样品的背散射电子设计。

This document specifies a calibration procedure of the energy step and the energy scale for electron energy loss spectroscopy in (scanning) transmission electron microscopes to an uncertainty of ±3 % for the energy range 0 eV to 3 000 eV.This document is intended for electron energy loss spectroscopy with transmitted electrons through sufficiently electron transparent samples, such as a thin foil sample, and is not designed for backscattered electrons from a bulk sample.

标准预览图