ISO 18516:2019 表面化学分析 以纳米到微米为范围的光束横向分辨率和锐度的测定

标准编号：ISO 18516:2019

中文名称：表面化学分析 以纳米到微米为范围的光束横向分辨率和锐度的测定

英文名称：Surface chemical analysis — Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres

发布日期：2019-01

标准范围

本文件描述了在成像表面化学分析中测量横向分辨率和清晰度的方法。它适用于所有表面分析方法，使用光束在仪器的规定设置下分析表面的化学成分。它适用于扫描仪器，其中在预先选择的视场中对样品进行精细聚焦的光束扫描，以及全场成像仪器，其中视场由宽光束、成像透镜系统和像素探测器同时成像。测量横向分辨率和锐度的方法如下:-直尺法；-窄线法；-光栅法。本文件适用于提供纳米厚度层信息的仪器和方法，以及具有纳米尺寸结构和单个纳米物体的表面。

This document describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis. It applies to all methods of surface analysis which use a beam to analyse the chemical composition of surfaces under defined settings of an instrument. It applies to scanning instruments, where a finely focused beam is scanned over the sample in a preselected field of view, as well as to full field imaging instruments, where the field of view is simultaneously imaged by a broad beam, an imaging lens system and a pixelated detector. The methods for measuring lateral resolution and sharpness are— the straight edge method;— the narrow line method;— the grating method.This document applies to instruments and methods that provide information on layers with nanometre thicknesses and to surfaces with nanometre‐sized structures and individual nano‐objects.

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