ISO 24237:2005 表面化学分析 X光光电子光谱学 强度标的再现性和恒定不变性

标准编号:ISO 24237:2005

中文名称:表面化学分析 X光光电子光谱学 强度标的再现性和恒定不变性

英文名称:Surface chemical analysis — X-ray photoelectron spectroscopy — Repeatability and constancy of intensity scale

发布日期:2005-06

标准范围

ISO 24237:2005规定了一种用于评估X射线光电子能谱仪强度标度的重复性和稳定性的方法,用于一般分析目的,使用非单色Al或Mg X射线或单色Al X射线。它仅适用于包含用于溅射清洗的离子枪的仪器。它不是强度/能量响应函数的校准。该校准可由仪器制造商或其他组织进行。本程序提供的数据用于评估和确认强度/能量响应函数在仪器使用情况下保持恒定的准确性。对可能影响这种稳定性的一些仪器设置给出了指导。

ISO 24237:2005 specifies a method for evaluating the repeatability and constancy of the intensity scale of X-ray photoelectron spectrometers, for general analytical purposes, using unmonochromated Al or Mg X-rays or monochromated Al X-rays. It is only applicable to instruments that incorporate an ion gun for sputter cleaning. It is not intended to be a calibration of the intensity/energy response function. That calibration may be made by the instrument manufacturer or other organization. The present procedure provides data to evaluate and confirm the accuracy with which the intensity/energy response function remains constant with instrument usage. Guidance is given on some of the instrument settings that may affect this constancy.

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