ISO/TS 27893:2009 真空技术 真空计 用与参考量表直接比较来评定校准结果的不确定度

标准编号:ISO/TS 27893:2009

中文名称:真空技术 真空计 用与参考量表直接比较来评定校准结果的不确定度

英文名称:Vacuum technology — Vacuum gauges — Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge

发布日期:2009-02

标准范围

ISO/TS 27893:2009给出了根据ISO/TS 3567,通过与参考仪表直接比较,确定和报告真空计校准期间产生的测量不确定度的指南。它描述了统一报告真空计证书不确定性的方法。根据ISO/TS 27893:2009报告的不确定度是可转移的,因为一个结果的评估不确定度可作为使用第一个结果的另一个测量或校准的不确定度评估的组成部分。本规范定义了两种足以涵盖大多数实际情况的测量模型。然而,给出的模型可能无法应用于新开发的真空计。证书中报告的最终不确定度根据输入量和影响量的不确定度进行评估。描述了可能影响真空校准结果的主要量;然而,可能影响最终结果的可能数量的完整列表不在ISO/TS 27893:2009的范围内。

ISO/TS 27893:2009 gives guidelines for the determination and reporting of measurement uncertainties arising during vacuum gauge calibration by direct comparison with a reference gauge in accordance with ISO/TS 3567. It describes methods for uniform reporting of uncertainties in vacuum gauge certificates. Uncertainties reported in accordance with ISO/TS 27893:2009 are transferable in the sense that the uncertainty evaluated for one result can be used as a component in the uncertainty evaluation of another measurement or calibration in which the first result is used.This specification defines two measurement models that are sufficient to cover most practical cases. However, it is possible that the models given cannot be applied to newly developed vacuum gauges.The final uncertainty to be reported in a certificate is evaluated from the uncertainties of the input quantities and influence quantities. The principal quantities that may affect the result of a vacuum calibration are described; however, a complete list of the possible quantities that may have an influence on the final result lies outside the scope of ISO/TS 27893:2009.

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