ISO 5302:2003 真空技术-涡轮分子泵-性能特性测定

标准编号：ISO 5302:2003

中文名称：真空技术-涡轮分子泵-性能特性测定

英文名称：Vacuum technology — Turbomolecular pumps — Measurement of performance characteristics

发布日期：2003-07

标准范围

ISO 5302:2003规定了涡轮分子泵性能特性的测量方法。它适用于所有尺寸和所有类型的涡轮分子泵，带有机械或磁性轴承，以及带有或不带有附加阻力级。

ISO 5302:2003 specifies methods for the measurements of performance characteristics of turbomolecular pumps. It is applicable to all sizes and all types of turbomolecular pumps, with mechanical or magnetic bearings, and with or without an additional drag stage.

标准预览图