ISO 14644-12:2018 清洁室及相关受控环境第12部分：用纳米颗粒浓度监测空气清洁度的规范

标准编号：ISO 14644-12:2018

中文名称：清洁室及相关受控环境第12部分：用纳米颗粒浓度监测空气清洁度的规范

英文名称：Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration