ISO/TR 15969:2001 表面化学分析-深度剖面-喷溅深度测定

标准编号：ISO/TR 15969:2001

中文名称：表面化学分析-深度剖面-喷溅深度测定

英文名称：Surface chemical analysis — Depth profiling — Measurement of sputtered depth

发布日期：2001-06

标准范围

本技术报告给出了在溅射深度剖面中测量溅射深度的指南。方法本技术报告中所述的溅射深度测量方法适用于表面处理技术当与离子轰击结合使用以将固体样品的一部分去除到溶液中时，进行化学分析典型的溅射深度可达几微米。

This Technical Report gives guidelines for measuring the sputtered depth in sputtered depth profiling. The methodsof sputtered depth measurement described in this Technical Report are applicable to techniques of surfacechemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to atypical sputtered depth of up to severalmicrometres.

标准预览图