ISO 14644-13:2017 洁净室和相关受控环境 第13部分：清洁表面以达到规定的清洁程度的粒子和化学分类

标准编号：ISO 14644-13:2017

中文名称：洁净室和相关受控环境 第13部分：清洁表面以达到规定的清洁程度的粒子和化学分类

英文名称：Cleanrooms and associated controlled environments — Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications

发布日期：2017-06

标准范围

ISO 14644-13:2017给出了洁净室表面、洁净室设备表面和洁净室材料表面清洁到规定程度的指南。正在考虑的是所有感兴趣的表面（外部或内部）。它提供了关于通过颗粒浓度（SCP）和化学浓度（SCC）等级达到所需表面清洁度的清洁方法评估指南，以及应考虑哪些技术来达到这些规定水平。清洁技术的适当性将参考ISO 14644-9和ISO 14644-10中的清洁度等级和相关测试方法。将提供以下一般指导事项:-预期的表面清洁度水平；-清洁方法的适用性；-表面与清洁技术的兼容性；-清洁适宜性评估。本文件不包括以下内容:-清洁方法的分类；-洁净室内生产的产品；-比表面-相关清洁方法；-详细说明各种清洗方法的清洗机理、方法和程序；-详细的材料特性；-通过清洁过程和时间相关效应描述损坏机制；-指污染物与表面之间的相互作用力，或通常与时间和过程有关的生成过程；-粒子的其他特性，如静电电荷、离子电荷等。；-分子污染物与表面之间的化学反应；-表面清洁度的微生物学方面；-污染的放射性方面；-健康和安全考虑；-环境方面，如废物处理、排放等。；-统计方法的选择和使用。

ISO 14644-13:2017 gives guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. Under consideration are all surfaces (external or internal) that are of interest. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) classes and which techniques should be considered to achieve these specified levels.The appropriateness of cleaning techniques will make reference to the cleanliness classes and associated test methods found in ISO 14644？9 and ISO 14644？10.The following matters of general guidance will be provided:- expected surface cleanliness levels;- suitability of cleaning methods;- compatibility of surfaces with the cleaning technique;- assessment of cleaning appropriateness.The following will be excluded from this document:- classification of cleaning methods;- product produced within a cleanroom;- specific surface-related cleaning methods;- detailed description of cleaning mechanisms, methods and procedures of various cleaning methods;- detailed material characteristics;- description of damage mechanisms by cleaning processes and time-dependent effects;- references to interactive bonding forces between contaminants and surfaces or generation processes that are usually time-dependent and process-dependent;- other characteristics of particles such as electrostatic charge, ionic charges, etc.;- chemical reactions between molecular contaminants and surfaces;- microbiological aspects of surface cleanliness;- radioactive aspects of contamination;- health and safety considerations;- environmental aspects such as waste disposal, emissions, etc.;- selection and use of statistical methods.

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