ISO 14644-8:2022 清洁室及相关受控环境 第8部分：按化学浓度（ACC）划分空气清洁度
标准编号：ISO 14644-8:2022
中文名称：清洁室及相关受控环境 第8部分：按化学浓度（ACC）划分空气清洁度
英文名称：Cleanrooms and associated controlled environments — Part 8: Assessment of air cleanliness by chemical concentration (ACC)
发布日期：2022-06
标准范围
本文件建立了典型的评估流程，以根据特定化学物质（单个、组或类别）的空气传播浓度来确定洁净室和相关受控环境中空气化学洁净度（ACC）的分级水平，并提供了一个协议，包括测试方法、分析和用于确定的时间加权因素。该文件目前仅考虑空气化学污染物浓度在100？g/m3和10？12？洁净室操作条件下g/m3。本文件不适用于那些不认为空气传播的化学物质对产品或工艺构成风险的行业、工艺或生产。本文件无意描述空气化学污染物的性质。该文件没有给出表面化学污染的分类。
This document establishes typical assessment processes to determine grading levels of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category), and provides a protocol to include test methods, analysis and time-weighted factors for their determination. This document currently considers only concentrations of air chemical contaminants between 100 g/m3 and 10？12 g/m3 under cleanroom operational conditions.This document is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process.It is not the intention of this document to describe the nature of air chemical contaminants.This document does not give a classification of surface chemical contamination.
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