ISO 11039:2012 表面化学分析 扫描探针显微镜 漂移率的测定

标准编号：ISO 11039:2012

中文名称：表面化学分析 扫描探针显微镜 漂移率的测定

英文名称：Surface chemical analysis — Scanning-probe microscopy — Measurement of drift rate

发布日期：2012-02

标准范围

ISO 11039:2012定义了用于表征扫描探针显微镜（SPM）仪器在X方向和Y方向上的漂移率的术语，并规定了测量方法。对于测量地形的SPM仪器，定义了在Z方向上的漂移率。尽管长期漂移率的行为可能是非线性的，但在用户定义的沉降时间后，长期漂移率和短期漂移率的行为都可以用典型的平均漂移率或典型的最大漂移率来表征。本国际标准适用于基于SPM图像的漂移率评估。它旨在帮助制造商以有意义且一致的方式引用规范中的漂移数据，并帮助用户描述漂移行为，以便设计有效的实验。这些测量不是为图像校正而设计的。

ISO 11039:2012 defines terms and specifies measurement methods for characterizing the drift rates of scanning-probe microscopy (SPM) instruments in the X- and Y-directions and, for SPM instruments measuring topography, the drift rate in the Z-direction. Though the behaviour of the long-term drift rate might be nonlinear, both that and the behaviour of the short-term drift rate after a user-defined settling time can be characterized by either typical average or typical maximum drift rates.This International Standard is suitable for evaluating the drift rate based on SPM images. It is intended to help manufacturers quote drift figures in specifications in a meaningful and consistent manner and to aid users to characterize the drift behaviour so that effective experiments can be designed. These measurements are not designed for image correction.

标准预览图