ISO 22493:2008 微光束分析 扫描电子显微镜术 词汇表

标准编号：ISO 22493:2008

中文名称：微光束分析 扫描电子显微镜术 词汇表

英文名称：Microbeam analysis — Scanning electron microscopy — Vocabulary

发布日期：2008-10

标准范围

ISO 22493:2008定义了扫描电子显微镜（SEM）实践中使用的术语。它涵盖了一般概念和具体概念，按照系统顺序按照其层次结构进行分类，并在适当的情况下包括ISO 23833中已经定义的术语。该词汇表适用于与SEM实践相关的所有标准化文件。此外，词汇表中的一些条款适用于与相关领域（如EPMA、AEM、EDS）相关的文件，以定义与这些领域相关的术语。

ISO 22493:2008 defines terms used in the practice of scanning electron microscopy (SEM). It covers both general and specific concepts classified according to their hierarchy in a systematic order, with those terms that have already been defined in ISO 23833 also included, where appropriate.The vocabulary is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of the vocabulary are applicable to documents relevant to related fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.

标准预览图