ISO 19694-7:2024 固定源排放 能源密集型工业温室气体排放的测定 第7部分：半导体和显示行业
标准编号：ISO 19694-7:2024
中文名称：固定源排放 能源密集型工业温室气体排放的测定 第7部分：半导体和显示行业
英文名称：Stationary source emissions — Determination of greenhouse gas emissions in energy-intensive industries — Part 7: Semiconductor and display industries
发布日期：2024-02
标准范围
本文件提供了计算半导体和显示行业温室气体(GHG)排放量的方法。该文件包括半导体器件、微机电系统（MEMS）、光伏（PV）器件和显示器的制造。该文件允许出于各种目的和不同的基础报告GHG排放量，如每个工厂、每个公司（按国家或地区）或国际集团。本文件涉及以下所有直接和间接温室气体来源:—？来自本公司拥有或控制的来源的直接温室气体排放[定义见ISO 14064-1:20 18，5.2.4 a)]，例如来自以下来源的排放:—？工艺:氟化化合物(FC)气体和一氧化二氮(N2O)用于蚀刻和晶片清洁(EWC)、远程等离子体清洁(RPC)、原位等离子体清洁(IPC)、原位热清洁(ITC)、N2O薄膜沉积(TFD)和其他使用N2O的工艺；—？与设备和现场车辆、房间供暖/制冷相关的燃料燃烧；—？用于现场发电的燃料的燃料燃烧；—？组织消耗的进口电力、热量或蒸汽产生的间接GHG排放【定义见ISO 14064-1:20 18，5.2.4 b）】。其他间接GHG排放【定义见ISO 14064-1:20 18，5.2.4 c）至f）】是一个组织的活动的结果，但来自其他组织拥有或控制的GHG源，不包括在本文件中。
This document provides a methodology for calculating greenhouse gas (GHG) emissions from the semiconductor and display industry. This document includes the manufacture of semiconductor devices, microelectromechanical systems (MEMS), photovoltaic (PV) devices and displays. This document allows to report GHG emissions for various purposes and on different bases, such as a per-plant basis, per-company basis (by country or by region) or an international group basis. This document addresses all of the following direct and indirect sources of GHG:
— direct GHG emissions [as defined in ISO 14064-1:2018, 5.2.4 a)] from sources that are owned or controlled by the company, such as emissions resulting from the following sources:
— process: fluorinated compound (FC) gases and nitrous oxide (N2O) used in etching and wafer cleaning (EWC), remote plasma cleaning (RPC), in situ plasma cleansing (IPC), in situ thermal cleaning (ITC), N2O thin film deposition (TFD), and other N2O using process;
— fuel combustion related to equipment and on-site vehicles, room heating/cooling;
— fuel combustion of fuels for on-site power generation;
— indirect GHG emissions [as defined in ISO 14064-1:2018, 5.2.4 b)] from the generation of imported electricity, heat or steam consumed by the organization.
Other indirect GHG emissions [as defined in ISO 14064-1:2018, 5.2.4 c) to f)], which are the consequence of an organization’s activities, but arise from GHG sources that are owned or controlled by other organizations, are excluded from this document.
标准预览图
