ISO 17862:2022 表面化学分析 二次离子质谱 单离子计数飞行时间质量分析仪强度标的线性

标准编号：ISO 17862:2022

中文名称：表面化学分析 二次离子质谱 单离子计数飞行时间质量分析仪强度标的线性

英文名称：Surface chemical analysis — Secondary ion mass spectrometry — Linearity of intensity scale in single ion counting time-of-flight mass analysers

发布日期：2022-09

标准范围

本文件规定了在单离子计数飞行时间（TOF）二次离子质谱仪中，使用基于聚四氟乙烯（PTFE）光谱中同位素比率的测试，确定强度刻度线性偏离可接受极限的最大计数率的方法。它还包括一种校正因微通道板（MCP）或闪烁体和光电倍增管的强度损失而产生的强度非线性的方法，随后是时间数字转换器（TDC）检测系统，该系统是由二次离子在其停滞时间内到达引起的。校正可以将强度范围增加95%线性系数高达50以上，因此可以对相关校正公式已证明有效的光谱仪使用更高的最大计数率。

This document specifies a method for determining the maximum count rate for an acceptable limit of divergence from linearity of the intensity scale in single ion counting time-of-flight (TOF) secondary ion mass spectrometers using a test based on isotopic ratios in spectra from poly(tetrafluoroethylene) (PTFE). It also includes a method to correct for intensity nonlinearity arising from intensity lost from a microchannel plate (MCP) or scintillator and photomultiplier followed by a time-to-digital converter (TDC) detection system caused by secondary ions arriving during its dead-time. The correction can increase the intensity range for 95 % linearity by a factor of up to more than 50 so that a higher maximum count rate can be employed for those spectrometers for which the relevant correction formulae have been shown to be valid.

标准预览图