ISO/TR 14644-21:2023 洁净室及相关受控环境 第21部分：空气中颗粒取样技术

标准编号：ISO/TR 14644-21:2023

中文名称：洁净室及相关受控环境 第21部分：空气中颗粒取样技术

英文名称：Cleanrooms and associated controlled environments — Part 21: Airborne particle sampling techniques

发布日期：2023-08

标准范围

本文件讨论了探针和颗粒计数器放置的物理限制，以及连接两者的任何管道，特别是在提供感兴趣的5微米及以上颗粒的代表性样品时。该文件进一步确定了分类和监测时采样性能的关键因素，以及确定和保持可达到的计数精度和现实生活中计数可行性之间可接受的折衷的良好做法。本文件包括一个决策树，用于确定对空气中颗粒进行采样时的关键考虑因素，以及系统是否需要进一步评估。还提供了示例来说明典型的应用挑战并展示如何使用决策树。假设本文件与ISO 14644-1和ISO 14644-2。本文件不是手册，而是说明性文件。它没有描述ISO 14644-1和ISO 14644-2中涉及的测量方法，但提供了帮助在评估新系统或现有系统时有效选择采样配置的信息。

This document discusses the physical limitations of probe and particle counter placement, and any tubing that connects the two, particularly in providing representative samples where particles 5 micrometres and greater are of interest.

The document further identifies the key factors of sampling performance when classifying and monitoring, and good practice to determine and maintain an acceptable compromise between attainable accuracy in counting and feasibility of counting in real-life situations.

This document includes a decision tree, used to identify key considerations when sampling airborne particles, and whether the system requires further assessment. There are also examples provided to illustrate typical application challenges and show how the decision tree can be used.

It is assumed that this document is read in conjunction with ISO 14644-1 and ISO 14644-2. This document is not a manual, but an explanatory document. It does not describe measurement methods, which is handled in ISO 14644-1 and ISO 14644-2, but provides information to help make effective choices of sampling configuration, when evaluating a new or existing system.

标准预览图