ISO 21360-4:2018 真空技术 测量真空泵性能的标准方法 第4部分：涡轮分子的真空泵

标准编号：ISO 21360-4:2018

中文名称：真空技术 测量真空泵性能的标准方法 第4部分：涡轮分子的真空泵

英文名称：Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 4: Turbomolecular vacuum pumps

发布日期：2018-07

标准范围

本文件与ISO 21360-1一起规定了涡轮分子真空泵性能特性的测量方法。它适用于所有尺寸和所有类型的涡轮分子真空泵，包括-带有机械或磁性轴承；-轴上有或没有附加的阻力级或其他泵级；-具有一个或多个进气口。由于涡轮分子真空泵由主泵支持，其性能不能完全由体积流量曲线确定。此外，涡轮分子真空泵的驱动装置和背压对其性能也很重要。以下内容完成了性能特征:-涡轮分子真空泵的流量和背压信息；-压缩比曲线（涡轮分子真空泵的压缩比与背压）。

This document, in conjunction with ISO 21360-1, specifies methods for the measurement of performance characteristics of turbomolecular vacuum pumps. It is applicable to all sizes and all types of turbomolecular vacuum pumps, including those— with mechanical or magnetic bearings;— with or without an additional drag stage(s) or other pumping stages on the shaft;— with one or more inlet ports.Since turbomolecular vacuum pumps are backed by primary pumps, their performance cannot be completely defined by the volume flow rate curve. Also, the driving device and the backing pressure of the turbomolecular vacuum pump is important to the performance.The following completes the performance characteristics:— information about throughputs and backing pressure of the turbomolecular vacuum pump;— the compression ratio curve (compression ratio vs backing pressure of turbomolecular vacuum pump).

标准预览图