ISO 14644-9:2012 清洁室及相关受控环境 第9部分：微粒浓度法进行表面清洁度分级

标准编号：ISO 14644-9:2012

中文名称：清洁室及相关受控环境 第9部分：微粒浓度法进行表面清洁度分级

英文名称：Cleanrooms and associated controlled environments — Part 9: Classification of surface cleanliness by particle concentration

发布日期：2012-08

标准范围

ISO 14644-9:20 12根据洁净室和相关受控环境应用中的颗粒浓度对固体表面的清洁度等级进行了分类。还提供了关于测试和测量方法的建议，以及关于表面特性的信息ISO 14644-9:20 12适用于洁净室和相关受控环境中的所有固体表面，如墙壁、天花板、地板、工作环境、工具、设备和产品。表面颗粒清洁度(SPC)分类仅限于0.05 μ m至500 μ m之间的颗粒。不考虑以下问题:特定工艺对表面清洁度和适用性的要求；清洁表面的程序；材料特性；指相互作用的结合力或生成过程，通常是时间-依赖和过程依赖；分类和检验统计方法的选择和使用；颗粒的其他特性，如静电电荷、离子电荷、微生物状态等。

ISO 14644-9:2012 establishes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics are also givenISO 14644-9:2012 applies to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environments, tools, equipment and products. The surface particle cleanliness (SPC) classification is limited to particles between 0,05 μm and 500 μm.The following issues are not considered:

• requirements for the cleanliness and suitability of surfaces for specific processes;
• procedures for the cleaning of surfaces;
• material characteristics;
• references to interactive bonding forces or generation processes that are usually time-dependent and process-dependent;
• selection and use of statistical methods for classification and testing;
• other characteristics of particles, such as electrostatic charge, ionic charges, microbiological state, etc.

标准预览图