ISO 11952:2019 表面化学分析 扫描探针显微镜 用扫描探针显微镜测定几何量：测量系统的校

标准编号：ISO 11952:2019

中文名称：表面化学分析 扫描探针显微镜 用扫描探针显微镜测定几何量：测量系统的校

英文名称：Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems

发布日期：2019-05

标准范围

本文件规定了在最高水平上测量几何量的扫描探针显微镜（SPM）扫描轴的特征和校准方法。它适用于提供进一步校准的设备，不适用于一般工业用途，可能需要较低水平的校准。本文件的目标如下:-通过长度单位的可追溯性，提高使用SPMs测量几何量的可比性；-定义校准过程的最低要求和验收条件；-确定仪器的校准能力（指定“校准-“能力”类别（适用于仪器）；-定义校准范围（测量条件和环境、测量范围、时间稳定性、可转移性）；-根据ISO/IEC指南98-3，提供一个模型，用于计算SPM测量中简单几何量的不确定度；-定义报告结果的要求。

This document specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.This document has the following objectives:— to increase the comparability of measurements of geometrical quantities made using SPMs by traceability to the unit of length;— to define the minimum requirements for the calibration process and the conditions of acceptance;— to ascertain the instrument's ability to be calibrated (assignment of a "calibrate-ability" category to the instrument);— to define the scope of the calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability);— to provide a model, in accordance with ISO/IEC Guide 98-3, to calculate the uncertainty for simple geometrical quantities in measurements using an SPM;— to define the requirements for reporting results.

标准预览图