ISO 21501-4:2007 粒径分布测定 单粒子光相互作用法 第4部分：洁净空间用光散射式尘埃粒子计数器

标准编号：ISO 21501-4:2007

中文名称：粒径分布测定 单粒子光相互作用法 第4部分：洁净空间用光散射式尘埃粒子计数器

英文名称：Determination of particle size distribution — Single particle light interaction methods — Part 4: Light scattering airborne particle counter for clean spaces

发布日期：2007-05

标准范围

ISO 21501-4:20 07描述了光散射气载粒子计数器（LSAPC）的校准和验证方法，该计数器用于测量悬浮在空气中的粒子的尺寸和粒子数浓度。ISO 21501-4:20 07中描述的光散射方法基于单个颗粒测量。通过该方法测量的颗粒的典型尺寸范围是粒径在0.1 μ m和10 μ m之间。符合ISO 21501-4:20 07的仪器用于根据ISO 14644-1对洁净室和相关受控环境中的空气洁净度进行分类，以及测量各种环境中颗粒的数量和尺寸分布。以下内容属于ISO 21501-4:20 07的范围:尺寸校准；尺寸设置的验证；计数效率；尺寸分辨率；误计数率；最大颗粒数浓度；采样流量；采样时间；取样量；校准间隔；测试报告。

ISO 21501-4:2007 describes a calibration and verification method for a light scattering airborne particle counter (LSAPC), which is used to measure the size and particle number concentration of particles suspended in air. The light scattering method described in ISO 21501-4:2007 is based on single particle measurements. The typical size range of particles measured by this method is between 0,1 μm and 10 μm in particle size.Instruments that conform to ISO 21501-4:2007 are used for the classification of air cleanliness in cleanrooms and associated controlled environments in accordance with ISO 14644-1, as well as the measurement of number and size distribution of particles in various environments.The following are within the scope of ISO 21501-4:2007:

• size calibration;
• verification of size setting;
• counting efficiency;
• size resolution;
• false count rate;
• maximum particle number concentration;
• sampling flow rate;
• sampling time;
• sampling volume;
• calibration interval;
• test report.

标准预览图