ISO 15632:2002 微光束分析-半导体探测器X射线光谱能量分散的仪器规范

标准编号：ISO 15632:2002

中文名称：微光束分析-半导体探测器X射线光谱能量分散的仪器规范

英文名称：Microbeam analysis — Instrumental specification for energy dispersive X-ray spectrometers with semiconductor detectors

发布日期：2002-12

标准范围

ISO 15632定义了表征能量色散X射线光谱仪（EDS）的最重要数量，该光谱仪由半导体探测器、前置放大器和信号处理单元组成，是必不可少的部件。本国际标准仅适用于带半导体探测器的光谱仪，其工作原理为固态电离。它规定了连接到电子探针微分析仪（EPMA）或扫描电子显微镜（SEM）的光谱仪的最低要求。分析的实现不在本国际标准的范围内。

ISO 15632 defines the most important quantities that characterize an energy dispersive X-ray spectrometer (EDS) consisting of a semiconductor detector, a pre-amplifier and a signal processing unit as the essential parts. This International Standard is only applicable to spectrometers with semiconductor detectors operating on the principle of solid state ionization. It specifies minimum requirements for such spectrometers attached to an electron probe microanalyser (EPMA) or a scanning electron microscope (SEM). Realization of the analysis is outside the scope of this International Standard.

标准预览图