ISO 21501-4:2018 粒度分布的测定 单粒子光相互作用方法 第4部分：洁净空间的光散射空气粒子计数器

标准编号：ISO 21501-4:2018

中文名称：粒度分布的测定 单粒子光相互作用方法 第4部分：洁净空间的光散射空气粒子计数器

英文名称：Determination of particle size distribution — Single particle light interaction methods — Part 4: Light scattering airborne particle counter for clean spaces

发布日期：2018-05

标准范围

本文件描述了光散射空气颗粒计数器（LSAPC）的校准和验证方法，该计数器用于测量悬浮在空气中的颗粒的粒度分布和颗粒数浓度。本文中描述的光散射方法基于单粒子测量。用这种方法测量的颗粒的典型尺寸范围在0.1μm到10μm之间。符合本文件要求的仪器用于根据ISO 14644？1和ISO 14644？2对洁净室和相关受控环境中的空气清洁度进行分类，以及测量各种环境中颗粒的数量和尺寸分布。以下参数在本文件范围内:-尺寸设置错误；-计数效率；-尺寸分辨率；-错误计数；-最大颗粒数浓度；-采样流量误差；-采样时间误差；-应答率；-校准间隔；-报告测试和校准结果。

This document describes a calibration and verification method for a light scattering airborne particle counter (LSAPC), which is used to measure the size distribution and particle number concentration of particles suspended in air. The light scattering method described in this document is based on single particle measurements. The typical size range of particles measured by this method is between 0,1 μm and 10 μm in particle size.Instruments that conform to this document are used for the classification of air cleanliness in cleanrooms and associated controlled environments in accordance with ISO 14644？1 and ISO 14644？2, as well as the measurement of number and size distribution of particles in various environments.The following parameters are within the scope of this document:— size setting error;— counting efficiency;— size resolution;— false count;— maximum particle number concentration;— sampling flow rate error;— sampling time error;— response rate;— calibration interval;— reporting results from test and calibration.

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