ISO 22309:2006 微光束分析-采用能谱仪（EDS）的定量分析

标准编号：ISO 22309:2006

中文名称：微光束分析-采用能谱仪（EDS）的定量分析

英文名称：Microbeam analysis — Quantitative analysis using energy-dispersive spectrometry (EDS)

发布日期：2006-04

标准范围

ISO 22309:2006给出了使用安装在扫描电子显微镜（SEM）或电子探针微量分析仪（EPMA）上的能量色散光谱法（EDS）对样本特定点或区域进行定量分析的指南；任何数量的表达，即以百分比（质量分数）表示的大/小或大/小量被认为是定量的。样本中所有元素的正确识别是定量分析的必要部分，因此ISO 22309:2006中考虑了这一点。ISO 22309:2006提供了各种方法的指南，适用于使用参考材料或无标准程序对质量分数低至1%的常规定量分析。它可用于原子序数Z大于10的元素。还提供了Z小于11的轻元素分析指南。

ISO 22309:2006 gives guidance on the quantitative analysis at specific points or areas of a specimen using energy-dispersive spectrometry (EDS) fitted to a scanning electron microscope (SEM) or electron probe microanalyser (EPMA); any expression of amount, i.e. in terms of percent (mass fraction), as large/small or major/minor amounts is deemed to be quantitative. The correct identification of all elements present in the specimen is a necessary part of quantitative analysis and is therefore considered in ISO 22309:2006. ISO 22309:2006 provides guidance on the various approaches and is applicable to routine quantitative analysis of mass fractions down to 1 %, utilising either reference materials or standardless procedures. It can be used with confidence for elements with atomic number Z greater than 10.Guidance on the analysis of light elements with Z less than 11 is also given.

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