ISO 20341:2003 表面化学分析-中离子质谱分析-多重Δ-层参考材料深度分辨率参数评定法

标准编号：ISO 20341:2003

中文名称：表面化学分析-中离子质谱分析-多重Δ-层参考材料深度分辨率参数评定法

英文名称：Surface chemical analysis — Secondary-ion mass spectrometry — Method for estimating depth resolution parameters with multiple delta-layer reference materials

发布日期：2003-07

标准范围

ISO 20341:2003规定了使用多个delta层参考材料在SIMS深度剖面中估算三个深度分辨率参数的程序，即前缘衰减长度、后缘衰减长度和高斯加宽。它不适用于delta层，在delta层中，由入射初级离子修饰的近表面区域的化学和物理状态不处于稳定状态。

ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.

标准预览图