ISO 18452:2005 精细陶瓷 （高级陶瓷,高技术陶瓷）-用接触式探针表面光度仪测定陶瓷涂层的厚度

标准编号：ISO 18452:2005

中文名称：精细陶瓷 （高级陶瓷,高技术陶瓷）-用接触式探针表面光度仪测定陶瓷涂层的厚度

英文名称：Fine ceramics (advanced ceramics, advanced technical ceramics) — Determination of thickness of ceramic films by contact-probe profilometer

发布日期：2005-11

标准范围

ISO 18452:2005规定了用接触探针轮廓仪测定精细陶瓷膜和陶瓷涂层的膜厚度的方法。该方法适用于10 nm至10000 nm范围内的薄膜厚度。

ISO 18452:2005 specifies a method for the determination of the film thickness of a fine ceramic film and ceramic coatings by a contact-probe profilometer. The method is suitable for film thicknesses in the range of 10 nm to 10 000 nm.

标准预览图