ISO/TS 80004-8:2020 纳米技术 词汇表 第8部分：纳米制造工艺

标准编号：ISO/TS 80004-8:2020

中文名称：纳米技术 词汇表 第8部分：纳米制造工艺

英文名称：Nanotechnologies — Vocabulary — Part 8: Nanomanufacturing processes

发布日期：2020-11

标准范围

本文件定义了纳米技术领域中与纳米制造工艺相关的术语。本文件中的所有工艺术语均与纳米制造相关，然而，许多列出的工艺并不完全与纳米尺度相关。定义中注明了非排他性术语。根据可控条件，此类工艺可在纳米尺度或更大尺度上产生材料特征。与纳米制造相关的工具、组件、材料、系统控制方法或计量方法的名称还有许多其他术语，超出了本文件的范围。ISO/TS 80004系列其他部分的术语和定义复制在第3条中，以便于上下文和更好地理解。

This document defines terms related to nanomanufacturing processes in the field of nanotechnologies.All the process terms in this document are relevant to nanomanufacturing, however, many of the listed processes are not exclusively relevant to the nanoscale. Terms that are not exclusive are noted within the definitions. Depending on controllable conditions, such processes can result in material features at the nanoscale or, alternatively, at larger scales.There are many other terms that name tools, components, materials, systems control methods or metrology methods associated with nanomanufacturing that are beyond the scope of this document.Terms and definitions from other parts of the ISO/TS 80004 series are reproduced in Clause 3 for context and better understanding.

标准预览图