ISO 25178-700:2022 产品几何技术规范（GPS） 表面结构：区域 第700部分：区域地形测量仪器的校准、调整和验证

标准编号：ISO 25178-700:2022

中文名称：产品几何技术规范（GPS） 表面结构：区域 第700部分：区域地形测量仪器的校准、调整和验证

英文名称：Geometrical product specifications (GPS) — Surface texture: Areal — Part 700: Calibration, adjustment and verification of areal topography measuring instruments

发布日期：2022-12

标准范围

本文件规定了ISO 25178-600中规定的区域形貌测量仪器共有的计量特性的校准、调整和验证的通用程序。因为表面轮廓可以从表面形貌图像中提取，所以本文档中描述的大多数方法可以适用于轮廓仪。本文件不涉及特定于仪器的问题。例如，对于探头遵循附加弧形运动的基于机械探测的仪器，在ISO 25178-701中规定了附加测量。本文件不包括面积积分方法的程序，尽管ISO 25178-6中也有规定。例如，光散射属于被称为用于测量表面形貌的面积积分方法的一类技术。

This document specifies generic procedures for the calibration, adjustment and verification of metrological characteristics that areal topography measuring instruments have in common, as stated in ISO 25178-600.

Because surface profiles can be extracted from surface topography images, most of the methods described in this document can be adapted to profiling instruments.

Instrument-specific issues are not covered by this document. For example, for instruments based on mechanical probing where the probe follows an additional arcuate motion, additional measures are specified in ISO 25178-701.

This document does not include procedures for area-integrating methods, although those are also stated in ISO 25178-6. For example, light scattering belongs to a class of techniques known as area-integrating methods for measuring surface topography.

标准预览图