ISO 23216:2021 碳基薄膜 用椭偏光谱法测定非晶碳薄膜的光学特性

标准编号：ISO 23216:2021

中文名称：碳基薄膜 用椭偏光谱法测定非晶碳薄膜的光学特性

英文名称：Carbon based films — Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry

发布日期：2021-05

标准范围

本文件规定了用于确定n-k平面内不同类型的非晶碳膜的光学性质（折射率n和消光系数k）和光学分类的光谱椭偏法。它适用于通过电离蒸发、溅射、电弧沉积、等离子体辅助化学气相沉积、热丝技术等沉积的非晶碳膜。它不适用于用金属或硅改性的碳膜、在厚度上具有组成/性能梯度的无定形碳膜、油漆和清漆。

This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.

标准预览图