ISO 22581:2021 表面化学分析 来自x射线光电子能谱测量扫描的近实时信息 含碳化合物表面污染的识别和校正规则

标准编号：ISO 22581:2021

中文名称：表面化学分析 来自x射线光电子能谱测量扫描的近实时信息 含碳化合物表面污染的识别和校正规则

英文名称：Surface chemical analysis — Near real-time information from the X-ray photoelectron spectroscopy survey scan — Rules for identification of, and correction for, surface contamination by carbon-containi

发布日期：2021-03

标准范围

本文件旨在帮助对材料上的薄膜进行表面分析，这些材料不被认为含有碳化合物作为预期成分，但在测量光谱中观察到C1s峰。薄膜可以是通过需氧或电化学氧化在金属和合金上生成的，也可以是沉积在惰性基底上的。所述程序不适用于基底上颗粒的不连续沉积。除此之外，还提供了一个简单的程序，用于从含碳表面污染物中识别C1s信号。当C1s峰值被确定为由不定上覆层引起时，可对测量光谱得出的成分的影响进行校正。建议的程序以简单规则的形式提供，以“如果-那么”的格式进行结构化，目的是它们所包含的信息可能会被数据系统中的自动化程序使用。提供的规则仅使用从XPS调查扫描中检索到的信息。

This document is provided to assist in the surface analysis of thin films on materials which are not thought to contain carbon compounds as intended components but for which a C1s peak is observed in the survey spectrum. The films can be those generated on metals and alloys by aerobic or electrochemical oxidation or be those deposited on inert substrates. The procedure described is not suitable for discontinuous deposits of particles on a substrate. With this exception, a simple procedure is provided for identifying the C1s signal from carbon-containing surface contamination. When the C1s peak is identified as arising from an adventitious over-layer the composition derived from the survey spectrum can be corrected for its influence. Recommended procedures are provided in the form of simple Rules structured in the 'If - Then` format with the intention that the information they embody might be utilised by automated procedures in data-systems. The rules provided utilize only information retrieved from the XPS survey scan.

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