ISO 23131:2021 椭偏测量 原理

标准编号：ISO 23131:2021

中文名称：椭偏测量 原理

英文名称：Ellipsometry — Principles

发布日期：2021-04

标准范围

本文件规定了一种通过认可的测试实验室测定UV-VIS-NIR光谱范围内的光学和介电常数以及在线生产控制、质量保证和材料开发领域的层厚度的方法。适用于独立测量系统。结果不确定度的表示符合ISO/IEC指南98-3。

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

标准预览图