ISO 14644-3:2019 洁净室及相关受控环境 第3部分：试验方法

标准编号：ISO 14644-3:2019

中文名称：洁净室及相关受控环境 第3部分：试验方法

英文名称：Cleanrooms and associated controlled environments — Part 3: Test methods

发布日期：2019-08

标准范围

本文件提供了支持洁净室和洁净区运行的测试方法，以满足空气清洁度分类、其他清洁度属性和相关受控条件。规定了两种类型的洁净室和洁净区的性能测试:具有单向气流的洁净室和具有非单向气流的洁净室，在三种可能的占用状态下:竣工、静止和运行。提供了测定性能参数的试验方法、推荐试验装置和试验程序。如果试验方法受洁净室或洁净区类型的影响，建议采用替代程序。对于一些试验，建议采用几种不同的方法和设备，以适应不同的最终用途考虑。本文件中未包含的替代方法可由客户和供应商协商使用。替代方法不一定提供等效测量。本文件不适用于洁净室、洁净区或分离装置中产品或过程的测量。注:本文件无意说明与其使用相关的安全注意事项（例如，在使用危险材料、操作和设备时）。本文件的使用者有责任在使用前建立适当的安全和健康实践，并确定监管限制的适用性。

This document provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions.Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional airflow and those with non-unidirectional airflow, in three possible occupancy states: as-built, at-rest and operational.The test methods, recommended test apparatus and test procedures for determining performance parameters are provided. Where the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested.For some of the tests, several different methods and apparatus are recommended to accommodate different end-use considerations. Alternative methods not included in this document can be used by agreement between customer and supplier. Alternative methods do not necessarily provide equivalent measurements.This document is not applicable to the measurement of products or of processes in cleanrooms, clean zones or separative devices.NOTE This document does not purport to address safety considerations associated with its use (for example, when using hazardous materials, operations and equipment). It is the responsibility of the user of this document to establish appropriate safety and health practices and to determine the applicability of regulatory limitations prior to use.

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