ISO/TS 21383:2021 微束分析 扫描电子显微镜 定量测量用扫描电子显微镜的鉴定

标准编号：ISO/TS 21383:2021

中文名称：微束分析 扫描电子显微镜 定量测量用扫描电子显微镜的鉴定

英文名称：Microbeam analysis — Scanning electron microscopy — Qualification of the scanning electron microscope for quantitative measurements

发布日期：2021-03

标准范围

本文件描述了使用数字成像系统对扫描电子显微镜进行定量和定性SEM测量的方法，通过评估必要的扫描电子显微镜性能参数，在安装仪器后保持性能。性能参数的项目和评估方法由用户自行选择。

This document describes methods to qualify the scanning electron microscope with the digital imaging system for quantitative and qualitative SEM measurements by evaluating essential scanning electron microscope performance parameters to maintain the performance after installation of the instruments. The items and evaluating methods of the performance parameters are selected by users for their own purposes.

标准预览图