ISO 14644-1:2015 洁净室及相关受控环境第1部分：用粒子浓度确定空气洁净度等级

标准编号：ISO 14644-1:2015

中文名称：洁净室及相关受控环境第1部分：用粒子浓度确定空气洁净度等级

英文名称：Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness by particle concentration