ISO 5820:2024 微束分析 超维数据文件规范(HMSA)

标准编号:ISO 5820:2024

中文名称:微束分析 超维数据文件规范(HMSA)

英文名称:Microbeam analysis — Hyper-dimensional data file specification (HMSA)

发布日期:2024-02

标准范围

MSA/MAS/AMAS超维数据文件规范(简称HMSA)是一种独立于平台的数据格式,允许在不同软件应用程序之间交换超维显微镜和微量分析数据。应用包括但不限于:—?高光谱图,如电子能量损失光谱(EELS)、能量色散x射线光谱(XEDS)或阴极发光光谱(CL)。—?“超图像”图,例如使用电子背散射衍射(EBSD)或会聚束电子束衍射(CBED)的图案图。—?3维图,如共焦显微镜或聚焦离子束(FIB)连续切片图。—?4维地图,如双倾斜电子断层扫描。—?时间分辨显微镜和光谱学。除了存储超-尺寸数据,HMSA文件格式适用于存储常规显微镜和微量分析数据,如光谱、线轮廓、图像和定量分析,以及实验条件和其他元数据。

The MSA/MAS/AMAS hyper-dimensional data file specification (HMSA, for short) is a platform-independent data format to permit the exchange of hyper-dimensional microscopy and microanalytical data between different software applications. The applications include, but are not limited to:

    Hyper-spectral maps, such as electron energy loss spectroscopy (EELS), energy dispersive x-ray spectrometry (XEDS), or cathodoluminescence spectroscopy (CL).

    ‘Hyper-image’ maps, such as pattern maps using electron backscatter diffraction (EBSD) or convergent beam electron diffraction (CBED).

    3-dimensional maps, such as confocal microscopy, or focused ion beam (FIB) serial section maps.

    4-dimensional maps, such as double-tilt electron tomography.

    Time-resolved microscopy and spectroscopy.

In addition to storing hyper-dimensional data, the HMSA file format is applicable for storing conventional microscopy and microanalysis data, such as spectra, line profiles, images, and quantitative analyses, as well as experimental conditions and other metadata.

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