ISO 14644-6:2007 清洁室及相关受控环境第6部分：词汇

标准编号：ISO 14644-6:2007

中文名称：清洁室及相关受控环境第6部分：词汇

英文名称：Cleanrooms and associated controlled environments — Part 6: Vocabulary

发布日期：2007-07

标准范围

ISO 14644-6:2007建立了与洁净室和相关受控环境相关的术语和定义词汇表。

ISO 14644-6:2007 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments.